THE EFFECTS OF METALLIC INTERLAYER FORMATION ON THE ADHESION PROPERTIES OF PACVD - TiN FILMS ON TOOL STEEL
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چکیده
منابع مشابه
THE EFFECTS OF METALLIC INTERLAYER FORMATION ON THE ADHESION PROPERTIES OF PACVD - TiN FILMS ON TOOL STEEL
The adhesion of PACVD TiN films on tool steel ( AISI Pa ) has been investigated as a function of interfacial chemistry and the metallic interlayer formation between TiN films and substrate steel. Prior to TiN deposition, thin metallic interlayers such as T i , Cr, Cu films were deposited on a steel substrate with thickness range of 200 2000 A by Magnetron qxtterhg. TiN films were deposited by R...
متن کاملCOMPARISON OF PROPERTIES OF TiN/TiCN AND PLASMA NITRIDING/TiCN FILMS DEPOSITED ON THE TOOL STEEL BY PULSED DC- PACVD
In this work, TiN/TiCN & PN/TiCN multilayer films were deposited by plasma- assisted chemical vapour deposition (PACVD). Plasma nitriding (PN) and TiN intermediate layer prior to coating leads to appropriate hardness gradient and it can greatly improve the mechanical properties of the coating. The composition, crystalline structure and phase of the films were investigated by X-ray d...
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ژورنال
عنوان ژورنال: Le Journal de Physique IV
سال: 1991
ISSN: 1155-4339
DOI: 10.1051/jp4:1991273